Precision Manufacturing

Precision manufacturing such as CNC grinding and polishing are techniques widely used to make various shapes for different optical applications. In the field of integrated microoptics,the aims are to generate optical components precisely aligned to each other. Thus, typical results of precision grinding and polishing microoptics elements, available at JENOPTIK Microoptics starts from 0.4 mm width and 0.02 mm sag height up to conventional diameter and sag inclusive aspheric or free form surfaces. Optical elements can be fabricated with < 0.003 mm parallelism of a reference side with respect to lithography. These microoptics have position accuracy with respect to lithography better than ± 0.02 mm, length tolerances better than ± 0.01 mm, and surface roughness down to DUV level.

Features

• Position accuracy w.r.t. lithography ± 0.002 mm
• Tolerances ± 0.002 mm
• Substrates: fused silica, glass, silicon
• Dimension tolerance ± 0.01mm
• Parallelism wrt. lithography < 0.003mm